Browsing by Author "Dombrowski, Kai"
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Publication Determination of stress in shallow trench isolation for deep submicron MOS devices by UV Raman spectroscopy
Proceedings paper1999, International Electron Devices Meeting. Technical digest; 5-8 Dec. 1999; Washington, D.C., USA., p.357-360Publication Investigation of stress in shallow trench isolation using UV micro-raman spectroscopy
Journal article2001, Microelectronics Reliability, (41) 4, p.511-515Publication Investigation of stress in STI using UV-Raman spectroscopy
Proceedings paper1999, ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium., p.196-199Publication Stress measurements in shallow trench isolation using μ-Raman spectroscopy
Publication Stress measurements using ultraviolet micro-Raman spectroscopy
Journal article1999, Appl. Phys. Lett., (75) 16, p.2450-2451