Browsing by Author "Drobny, Vladimir"
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Publication Defect-free isolation on high-thermal-conductivity SOI substrates for complementary BiCMOS technology
; ; ; ; Proceedings paper2009, International Conference on Solid State Devices and Materials - SSDM, 6/10/2009, p.824-825Publication Sandwich stacks replacing SiO2 in standard bonded Si-on-insulator (SOI) substrates to obtain a high-thermal conductivity HTC-SOI substrate
Proceedings paper2008, IEEE International SOI Conference Proceedings, 6/10/2008, p.67-68