Browsing by Author "Durant, Stephane"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Defect source analysis of directed self-assembly process
Journal article2013, Journal of Micro/Nanolithography MEMS and MOEMS, (12) 3, p.31112Publication Defect source analysis of directed self-assembly process (DSA of DSA)
Proceedings paper2013, Alternative Lithographic Technologies V, 24/02/2013, p.86800LPublication Inspection of directed self assembly defects