Publication:

Defect source analysis of directed self-assembly process (DSA of DSA)

Date

2013

Proceedings Paper

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Author(s)

Rincon Delgadillo, Paulina

;

Harukawa, Ryota

;

;

Durant, Stephane

;

;

Nagaswami, Venkat

;

Van Den Heuvel, Dieter

;

;

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2078 since deposited on 2021-10-21

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Acq. date: 2026-08-31