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Defect source analysis of directed self-assembly process (DSA of DSA)

Date

2013
Proceedings Paper
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dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorHarukawa, Ryota
dc.contributor.authorSuri, Mayur
dc.contributor.authorDurant, Stephane
dc.contributor.authorCross, Andrew
dc.contributor.authorNagaswami, Venkat
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorCross, Andrew
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorGronheid, Roel
dc.date.accessioned2021-10-21T11:24:31Z
dc.date.available2021-10-21T11:24:31Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22997
dc.source.beginpage86800L
dc.source.conferenceAlternative Lithographic Technologies V
dc.source.conferencedate24/02/2013
dc.source.conferencelocationSan Jose, CA USA
dc.title

Defect source analysis of directed self-assembly process (DSA of DSA)

dc.typeProceedings paper
dspace.entity.typePublication
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