Browsing by Author "Dusa, M."
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Publication CD control using SiON BARL processing for sub 0.25µm lithography
Oral presentation1998, MNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium.Publication CD control using SiON BARL processing for sub-0.25μm lithography
Journal article1999, Microelectronic Engineering, (46) 1_4, p.51-54Publication CD-control comparison for sub-0.18μm patterning using 248 nm lithography and strong resolution enhancement techniques
Proceedings paper1999, Optical Microlithography XII, 14/03/1999, p.228-238Publication KrF lithography for 130nm
; Proceedings paper2000, Optical Microlithography XIII, 1/03/2000, p.192-205Publication Optimisation methodology towards a manufacturable 0.3 μm poly-gate process using i-line lithography
Proceedings paper1996, Proceedings of the Microlithography Seminar INTERFACE, 27/10/1996, p.223-246