Browsing by Author "Dussarat, Christian"

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Cryo-etching for integration in micro-electronic : Silicon deep etch for contact and low-k integration in Back end of line (BEOL)

Chanson, Romain
;
Lefaucheux, Philippe
;
Dussart, Remi
;
Shen, Peng
;
Urabe, Keiichiro
Meeting abstract
2017, iplasmaNano-VIII: 8th International Conference on Plasma Nanoscience, 2/07/2017, p.77
Cryoetching processes applied to ULK material

Leroy, Floriane
;
Tillocher, Thomas
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Lefaucheux, Philippe
;
Dussart, Remi
;
yatsuda, koichi
Meeting abstract
2015, 37th International Symposium on Dry Process - DPS, 5/11/2015
Low damage ULK etching by means of high boiling point organic condensation

Chanson, Romain
;
Holtzer, Nicolas
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Lefaucheux, Philippe
;
Dussart, Rémi
;
SHEN, Peng
Meeting abstract
2017, Materials Research Society Spring Meeting, 17/04/2017, p.ED9.3.03
Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics

de Marneffe, Jean-Francois
;
Zhang, Liping
;
Watanabe, Mitsuhiro
;
yatsuda, koichi
;
Maekawa, Kaoru
Oral presentation
2016, SPIE Advanced Lithography Conference