Browsing by Author "Dussarrat, Christian"

Now showing 1 - 2 of 2

Low-k integration: Gas screening for cryogenic etching and damage mitigation

Chanson, Romain
;
Dussart, Remi
;
Tillocher, Thomas
;
Lefaucheux, Philippe
;
Dussarrat, Christian
Journal article
2019, Frontiers of Chemical Science and Engineering, (13) 3, p.511-516
Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

Zhang, Liping
;
de Marneffe, Jean-Francois
;
Leroy, Florian
;
Lefaucheux, Philippe
Journal article
2016, Journal of Physics D: Applied Physics, (49) 17, p.17