Browsing by Author "Dussart, R"
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Publication Cryogenic etching of porous organosilicate low-k materials: reduction of plasma induced damage
Meeting abstract2015, AVS 62nd International Symposium & Exhibition, 19/10/2015, p.124Publication Cryogenic etching processes applied to porous low-k materials using C4F8/SF6 plasmas
Journal article2015, Journal of Physics D: Applied Physics, (48) 43, p.435202