Browsing by Author "Edson, Joseph"
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Publication Integrated fab process for metal oxide EUV photoresist
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250SPublication Metal oxide EUV photoresist performance for N7 relevant patterns and processes
Proceedings paper2016, Advances in Patterning Materials and Processes XXXIII, 21/02/2016, p.977904