Browsing by Author "Ein Eli, Yair"

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Elucidating advanced inhibitor material in copper CMP: K-sorbate as a passivator

Tamir, Magi
;
Vaes, Jan
;
Ein Eli, Yair
Proceedings paper
2008, 13th International CMP Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC, 3/03/2008
Elucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurry

Nagar, Magi
;
Vaes, Jan
;
Ein Eli, Yair
Oral presentation
2008, 8th Israel Conference on Corrosion
K-sorbate as a passivator in copper chemical mechanical planarization (CMP) slurries

Nagar, Magi
;
Vaes, Jan
;
Ein Eli, Yair
Oral presentation
2008, 7th International Symposium on Electrochemical Micro & Nano-system Technologies - EMNT