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Browsing by Author "El-Kazzi, Mario"

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    H2S molecular beam passivation of Ge(001)

    Merckling, Clement  
    ;
    Chang, Yao-Chung
    ;
    Lu, Chung-Yu
    ;
    Penaud, Julien
    ;
    El-Kazzi, Mario
    Journal article
    2011, Microelectronic Engineering, (88) 4, p.399-402
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    High oxidation state at the epitaxial interface of g-Al2O3 thin films grown on Si(111) and Si(001)

    El-Kazzi, Mario
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    Merckling, Clement  
    ;
    Saint-Girons, Guillaume
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    Grenet, Genevieve
    ;
    Silly, M.
    Journal article
    2010, Applied Physics Letters, (97) 15, p.151902
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    Molecular beam epitaxy passivation studies of Ge and III-V semiconductors for advanced CMOS

    Merckling, Clement  
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    Penaud, Julien
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    Kohen, David
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    Bellenger, Florence
    ;
    Alian, AliReza  
    Journal article
    2009, Microelectronic Engineering, (86) 7_9, p.1592-1595
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    Molecular Beam Epitaxy study of a common a-GeO2 interfacial passivation layer for Ge- and GaAs-based MOS heterostructures

    Merckling, Clement  
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    Penaud, Julien
    ;
    Bellenger, Florence
    ;
    Kohen, David
    ;
    Brammertz, Guy  
    Proceedings paper
    2009, CMOS Gate Stack Scaling. Materials, Interfaces, and Reliability, 13/04/2009, p.C06.07
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    Strategies for CMOS low equivalent oxide thickness achievement with high-k oxides grown on Si(001) by MBE

    Beccera, Loic
    ;
    Baboux, Nicolas
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    Plossu, Carole
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    Merckling, Clement  
    ;
    El-Kazzi, Mario
    Proceedings paper
    2008, Materials Science of High-k Dielectric Stackx - From Fundamentals to Technology, 24/03/2008, p.1073-H3-08
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    Synchrotron radiation and conventional X-ray source photoemission studies of epitaxial g-Al2O3 thin films grown on Si(111) & Si(001) substrates by molecular beam epitaxy

    El-Kazzi, Mario
    ;
    Merckling, Clement  
    ;
    Grenet, Genevieve
    ;
    Saint-Girons, Guillaume
    Proceedings paper
    2009, CMOS Gate-Stack Scaling - Materials, Interfaces, and Reliability Implications, 13/04/2009, p.C08-08
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    X-ray photoelectron diffraction study of thin Al2O3 films grown on Si(111) by molecular beam epitaxy

    El-Kazzi, Mario
    ;
    Grenet, Genevieve
    ;
    Merckling, Clement  
    ;
    Saint-Girons, Guillaume
    Journal article
    2009, Physical Review B, (79) 19, p.195312

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