Browsing by Author "Ellison, Christopher"
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Publication A progress report on DSA of high-chi silicon containing block co-polymers
Publication Directed self-assembly of silicon-containing block copolymers for 20nm lithography
Publication Directed self-assembly of silicon-containing block copolymers with a hybrid chemo-/grapho-epitaxial flow
Publication Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures
Publication High chi block copolymers: a progress report
Publication Optimizing surface treatments for the directed self-assembly of silicon-containing block copolymers