Browsing by Author "Engelen, Jan"
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Publication Crack-free GaN Grown on Si(111) by MOVPE by introducing Step-Graded AlGaN Buffer Layers
Publication Evidence of speckle in extreme-UV lithography
Journal article2012-10, Optics Express, (20) 23, p.25970-25978Publication Mask effects on resist variability in extreme ultraviolet lithography
Journal article2013, Japanese Journal of Applied Physics, (52) 6, p.03GC02