Browsing by Author "Ervin, Joe"
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Publication N7 FinFET self-aligned quadruple patterning modeling
Proceedings paper2018, 2018 International Conference on Simulation of Semiconductor Processes and Devices - SISPAD, 24/09/2018, p.344-347Publication Self-aligned fin cut last patterning scheme for fin arrays of 24nm pitch and beyond
Proceedings paper2019, Advances in Patterning Materials and Processes XXXVI, 24/02/2019, p.109600NPublication Self-aligned fin cut last patterning scheme for fin arrays of 24nm pitch and beyond
Oral presentation2018, SPIE Advanced Lithography