Browsing by Author "Escorcia, O."
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Publication Improved low-k dielectric properties using He/H2 plasma for resist removal
Meeting abstract2008, Advanced Metallization Conference - AMC, 23/09/2008Publication Role of dielectric and barrier integrity in reliability of sub-100nm copper low-k interconnect
Proceedings paper2005, 43rd Annual IEEE International Reliability Physics Symposium Proceedings, 17/04/2005, p.495-500