Publication:

Improved low-k dielectric properties using He/H2 plasma for resist removal

Date

2008
Meeting abstract
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Author(s)

Urbanowicz, Adam
;
Shamiryan, Denis
;
Marsik, Premysl
;
Travaly, Youssef
;
Verdonck, Patrick  
;
Vanstreels, Kris  
;
Ferchichi, Abdelkarim
;
De Roest, David  
;
Sprey, Hessel  
;
Matsushita, K.
;
Kaneko, S.
;
Tsuji, N.
;
Luo, S.
;
Escorcia, O.
;
Berry, Ivan
;
Waldfried, Carlo
;
De Gendt, Stefan  
;
Baklanov, Mikhaïl

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Abstract

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1979 since deposited on 2021-10-17
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1979 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-08

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