Browsing by Author "Felch, Susan"
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Publication Advanced USJ for high-k / metal gate CMOS devices
Meeting abstract2008, MRS Spring Meeting Symposium E: Doping Engineering for Front-End Processing, 24/03/2008, p.E4.7Publication Manufacturable processes for =32-nm-node CMOS enhancement by synchronous optimization of strain-engineered channel and external parasitic resistances
Journal article2008, IEEE Transactions on Electron Devices, (55) 5, p.1259-1264Publication Performance enhancement of PFET planar devices by plasma immersion ion implantation (P3i)
Proceedings paper2008, 17th International Conference on Ion Implantation Technology - IIT, 8/06/2008, p.465-468