Publication:

Advanced USJ for high-k / metal gate CMOS devices

Date

2008

Meeting abstract

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Author(s)

Absil, Philippe

;

Ortolland, Claude

;

Aoulaiche, Marc

;

;

Verheyen, Peter

;

Vrancken, Christa

;

Horiguchi, Naoto

;

;

;

Schreutelkamp, Rob

;

Hoffmann, Thomas Y.

Statistics

2008 since deposited on 2021-10-17

Acq. date: 2026-09-11