Browsing by Author "Fischer, Pamela"
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Publication High-k dielectrics for future generation memory devices
; ; ; Wang, Xin PengJournal article2009, Microelectronic Engineering, (86) 7_9, p.1789-1795Publication Scaling of floating gate electrode for sub-40nm flash technologies
Proceedings paper2008, 38th European Solid-State Device Research Conference - ESSDERC, 15/09/2008, p.123-125Publication The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
Proceedings paper2007, IEEE International Interconnect Technology Conference - IITC, 4/06/2007, p.164-166