Browsing by Author "Fischer, Paul"
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Publication Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour
Proceedings paper2009, Advanced Metallization Conference 2008 (AMC2008), 23/09/2008, p.415-429Publication Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour
Meeting abstract2008, Advanced Metallization Conference - AMC, 23/09/2008