Publication:
Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour
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1994 since deposited on 2021-10-17
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Acq. date: 2026-02-25
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Statistics
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1994 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-02-25
Citations