Browsing by Author "Flannery, C. M."

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Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy

Flannery, C. M.
;
Wittkowski, T.
;
Jung, K.
;
Hillebrands, B.
;
Baklanov, Mikhaïl
Journal article
2002, Applied Physics Letters, (80) 24, p.4594-4596
Nondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopy

Flannery, C. M.
;
Baklanov, Mikhaïl
Proceedings paper
2002, Proceedings of the IEEE International Interconnect Technology Conference, 3/06/2002, p.233-235
Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen

Baklanov, Mikhaïl
;
Jehoul, Christiane
;
Flannery, C. M.
;
Moguilnikov, Konstantin
;
Gore, R.
Proceedings paper
2002, Advanced Metallization Conference 2001, 9/10/2001, p.273-278
Thin-film aerogel porosity and stiffness characterised by Surface Acoustic Wave Spectroscopy

Flannery, C. M.
;
Murray, C.
;
Baklanov, Mikhaïl
;
Streiter, I.
;
Schulz, S. E.
Oral presentation
2001, MRS Spring; 2001; San Francisco, CA, USA.