Browsing by Author "Folmer Nielsen, Peter"
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Publication Advanced carrier depth profiling on Si and Ge with M4PP
Proceedings paper2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 6/05/2007Publication Advanced carrier depth profiling on Si and Ge with micro four-point probe
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.317-321