Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Advanced carrier depth profiling on Si and Ge with micro four-point probe
Publication:
Advanced carrier depth profiling on Si and Ge with micro four-point probe
Copy permalink
Date
2008
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
15082.pdf
122.44 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Eyben, Pierre
;
Parmentier, Brigitte
;
Van Daele, Benny
;
Satta, Alessandra
;
Vandervorst, Wilfried
;
Lin, Rong
;
Petersen, Dirch H.
;
Folmer Nielsen, Peter
Journal
Journal of Vacuum Science and Technology B
Abstract
Description
Metrics
Views
1901
since deposited on 2021-10-17
1
last month
Acq. date: 2026-01-05
Citations
Metrics
Views
1901
since deposited on 2021-10-17
1
last month
Acq. date: 2026-01-05
Citations