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Advanced carrier depth profiling on Si and Ge with micro four-point probe
Publication:
Advanced carrier depth profiling on Si and Ge with micro four-point probe
Date
2008
Journal article
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15082.pdf
122.44 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Eyben, Pierre
;
Parmentier, Brigitte
;
Van Daele, Benny
;
Satta, Alessandra
;
Vandervorst, Wilfried
;
Lin, Rong
;
Petersen, Dirch H.
;
Folmer Nielsen, Peter
Journal
Journal of Vacuum Science and Technology B
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1897
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1897
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations