Publication:

Advanced carrier depth profiling on Si and Ge with micro four-point probe

Date

2008

Journal article

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Files

15082.pdf 122.44 KB

Author(s)

Clarysse, Trudo

;

;

Parmentier, Brigitte

;

Van Daele, Benny

;

Satta, Alessandra

;

Vandervorst, Wilfried

;

;

Petersen, Dirch H.

;

Folmer Nielsen, Peter

Journal

Journal of Vacuum Science and Technology B

Statistics

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Acq. date: 2026-02-26