Publication:

Advanced carrier depth profiling on Si and Ge with M4PP

Date

2007

Proceedings Paper

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Author(s)

Clarysse, Trudo

;

;

Parmentier, Brigitte

;

Van Daele, Benny

;

Satta, Alessandra

;

Vandervorst, Wilfried

;

;

Petersen, Dirch

;

Folmer Nielsen, Peter

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1939 since deposited on 2021-10-16

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Acq. date: 2026-03-17