Browsing by Author "Fouere, J.C."

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High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry

Boher, P.
;
Evrard, P.
;
Defranoux, C.
;
Darragon, A.
;
Sun, Lianchao
;
Fouere, J.C.
;
Stehlé, J.L.
Proceedings paper
2003-12, MRS Fall Meeting Symposium E: Fundamentals of Novel Oxide/Semiconductor Interfaces, 1/12/2003
High-k dielectric characterization by VUV spectroscopic ellipsometry and X-ray reflection

Boher, P.
;
Evrard, P.
;
Defranoux, C.
;
Fouere, J.C.
;
Bellandi, E.
;
Bender, Hugo
Proceedings paper
2003, Characterization and Metrology of ULSI Technology, 24/03/2003, p.148-153