Browsing by Author "Fried, David"
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Publication A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard 5nm BEOL two-level metal flow
Proceedings paper2016, International Conference on Simulation of Semiconductor Processes and Devices - SISPAD, 6/09/2016, p.43-46Publication RMG nMOS 1st process enabling 10x lower gate resistivity in N7 bulk FinFETs
Proceedings paper2015, Symposium on VLSI Technology, 15/06/2015, p.148-149