Browsing by Author "Fuchimoto, Daisuke"
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Publication Contour-based metrology for complex 2D shaped patterns printed by multiple-patterning process
Publication Implementation of templated DSA for via layer patterning at the 7 nm node
Proceedings paper2015, Alternative Lithographic Technologies VII, 23/02/2015, p.942305Publication Measurement technology to quantify 2D pattern shape in sub-2xnm advanced lithography
Proceedings paper2013, Metrology, Inspection, and Process Control for Microlithography XXVII, 25/02/2012, p.86810A