Publication:

Implementation of templated DSA for via layer patterning at the 7 nm node

Date

2015

Proceedings Paper

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Files

30375.pdf 1.47 MB

Author(s)

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Karageorgos, Ioannis

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Ryckaert, Julien

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Vandenberghe, Geert

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Somervell, Mark

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Fenger, Germain

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Fuchimoto, Daisuke

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1911 since deposited on 2021-10-22

Acq. date: 2026-01-26