Browsing by Author "Fujimoto, Kiwamu"
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Publication A novel CBRAM integration using subtractive dry-etching process of Cu enabling high-performance memory scaling down to 10nm node
Proceedings paper2015, IEEE Symposium on VLSI Technology, 15/06/2015, p.134-135Publication Magnetic tunnel junctions etch and encapsulation process optimization for high-density STT-MRAM applications
Meeting abstract2016, AVS 63rd International Symposium and Exhibition, 6/11/2016, p.PS-ThP33