Publication:

Magnetic tunnel junctions etch and encapsulation process optimization for high-density STT-MRAM applications

Date

2016
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Author(s)

Souriau, Laurent  
;
Radisic, Dunja  
;
Kundu, Shreya  
;
Paraschiv, Vasile  
;
Yamashita, Fumiko
;
Fujimoto, Kiwamu
;
Tahara, Shigeru
;
Maeda, K.
;
Kim, Woojin  
;
Rao, Siddharth  
;
Donadio, Gabriele Luca  
;
Crotti, Davide  
;
Tsvetanova, Diana  
;
Swerts, Johan  
;
Mertens, Sofie  
;
Lin, Tsann
;
Couet, Sebastien  
;
Piumi, Daniele  
;
Kar, Gouri Sankar  
;
Furnemont, Arnaud  

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1953 since deposited on 2021-10-23
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Acq. date: 2025-12-10

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