Browsing by Author "Gangala, Hareen K"
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Publication 0.18 μm KrF lithography using optical proximity correction based on empirical behavior modeling
Journal article1998, Journal of Vacuum Science and Technology B, (12) 6, p.3398-3404Publication CD control using SiON BARL processing for sub 0.25µm lithography
Oral presentation1998, MNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium.Publication CD control using SiON BARL processing for sub-0.25μm lithography
Journal article1999, Microelectronic Engineering, (46) 1_4, p.51-54Publication Lithography simulation with aerial image - variable threshold resist model
Publication Lithography simulation with aerial image-variable threshold resist model
Publication Qualification of electrical linewidth measurements (ELM) as a metrology tool for 0.18μm and below
Proceedings paper1998, Proceedings of the Microlithography Symposium. Interface '98, 15/11/1998, p.263-276