Browsing by Author "Garbowski, Tomasz"

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Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope

Neumann, Jens Timo
;
Srikantha, Abhilash
;
Huethwohl, Philipp
;
Lee, Keumsil
;
William, B. James
Journal article
2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 2, p.Art. 021009
Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM

Neumann, Jens Timo
;
Srikantha, Abhilash
;
Huthwohl, Philipp
;
Lee, Keumsil
;
William, James B.
Proceedings paper
2022, Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference, FEB 24-MAY 27, 2022, p.Art. 1203501