Browsing by Author "Garidis, Kostas"
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Publication Mask effects on resist variability in extreme ultraviolet lithography
Journal article2013, Japanese Journal of Applied Physics, (52) 6, p.03GC02Publication Stochastic limitations for EUV resist kinetics towards the 16nm node
Proceedings paper2011, International Symposium on Extreme Ultraviolet Lithography - EUVL, 17/10/2011