Browsing by Author "Garreis, R."
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Publication High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at imec-N10 logic node
Proceedings paper2017, Metrology, Inspection, and Process Control for Microlithography XXXI, 25/02/2017, p.101451SPublication Imaging semiconductor patterns at N10 logic node with a high-throughput multi-beam SEM
Meeting abstract2016, 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN, 31/05/2016, p.3B3