Browsing by Author "Geens, Veerle"
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Publication A Ge matrix removal method for metallic contamination analysis on Ge wafers using TXRF
Oral presentation2004, European Conference on X-Ray SpectrometryPublication Remediation for TXRF saturation effects on micro-droplet residues from preconcentration methods on semiconductor wafers
Journal article2005, Journal of Analytical Atomic Spectrometry, (20) 7, p.652-658Publication VPD-DC-TXRF for metallic contamination analysis of Ge wafers
Oral presentation2004, 7th International Symposium on Ultra Clean Processing - UCPSS