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A Ge matrix removal method for metallic contamination analysis on Ge wafers using TXRF
Publication:
A Ge matrix removal method for metallic contamination analysis on Ge wafers using TXRF
Date
2004
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hellin, David
;
Geens, Veerle
;
Teerlinck, Ivo
;
Rip, Jens
;
Theuwis, Antoon
;
De Gendt, Stefan
;
Vinckier, Chris
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2101
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
2101
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations