Browsing by Author "Genchev, I."

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Characterization of ultra thin oxynitrides, a general approach

Brijs, Bert
;
Deleu, Jeroen
;
Conard, Thierry
;
De Witte, Hilde
;
Vandervorst, Wilfried
;
Nakajima, K.
Oral presentation
1999, IBA-14-ECAART-6; July 1999; Dresden, Germany.
Characterization of ultra thin oxynitrides: a general approach

Brijs, Bert
;
Deleu, Jeroen
;
Conard, Thierry
;
De Witte, Hilde
;
Vandervorst, Wilfried
;
Nakajima, K.
Journal article
2000, Nuclear Instruments and Methods B, 161-163, p.429-434