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Characterization of ultra thin oxynitrides, a general approach
Publication:
Characterization of ultra thin oxynitrides, a general approach
Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brijs, Bert
;
Deleu, Jeroen
;
Conard, Thierry
;
De Witte, Hilde
;
Vandervorst, Wilfried
;
Nakajima, K.
;
Kimura, K.
;
Genchev, I.
;
Bergmaier, A.
;
Goergens, I.
;
Neumaier, P.
;
Dollinger, G.
;
Dobeli, M.
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2037
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations
Metrics
Views
2037
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations