Publication:
Characterization of ultra thin oxynitrides, a general approach
Date
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Deleu, Jeroen | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | De Witte, Hilde | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Nakajima, K. | |
| dc.contributor.author | Kimura, K. | |
| dc.contributor.author | Genchev, I. | |
| dc.contributor.author | Bergmaier, A. | |
| dc.contributor.author | Goergens, I. | |
| dc.contributor.author | Neumaier, P. | |
| dc.contributor.author | Dollinger, G. | |
| dc.contributor.author | Dobeli, M. | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-06T10:45:36Z | |
| dc.date.available | 2021-10-06T10:45:36Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3271 | |
| dc.source.conference | IBA-14-ECAART-6; July 1999; Dresden, Germany. | |
| dc.title | Characterization of ultra thin oxynitrides, a general approach | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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