Browsing by Author "Goethals, Frederik"

Now showing 1 - 3 of 3

A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers

Goethals, Frederik
;
Baklanov, Mikhaïl
;
Ciofi, Ivan
;
Detavernier, Christophe
Journal article
2012, Chemical Communications, (48) 22, p.2797-2799
Pore sealing of high porosity mesoporous silica films by self-assembled carbon-bridged organosilicas

Goethals, Frederik
;
Baklanov, Mikhaïl
;
Van der Voort, Pascal
;
Van Driessche, Isabel
Meeting abstract
2012, MRS Spring Meeting Symposium C: Interconnect Challenges for CMOS Technology, 9/04/2012, p.C1.3
Ultra low-k cyclic carbon-bridged PMO films with a high chemical resistance

Goethals, Frederik
;
Ciofi, Ivan
;
Madia, Oreste
;
Vanstreels, Kris
;
Baklanov, Mikhaïl
Journal article
2012, Journal of Materials Chemistry, (22) 17, p.8281-8286