Browsing by Author "Granneman, Ernst"
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Publication Emissivity independent heating of 3D patterns
Proceedings paper2007, Extended Abstracts of the 7th International Workshop on Junction Technology - IWJT, 8/06/2007, p.141-142Publication First electrical demonstration of DRAM compatible Ni silicides
Oral presentation2009, 18th Workshop Materials for Advanced Metallization - MAMPublication Pattern-dependent heating of 3D structures
Publication The effect of ramp rate - short process time and partial reactions on Cobalt and Nickel silicide formation
Proceedings paper2004, Advanced Short-Time Thermal Processing for Si-Based CMOS Devices II, 9/05/2004, p.174-182Publication Widening of FUSI RTP process window by spike anneal
Proceedings paper2007, 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 2/10/2007, p.111-117