Publication:

Widening of FUSI RTP process window by spike anneal

Date

2007

Proceedings Paper

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Author(s)

;

;

Absil, Philippe

;

Chiarella, Thomas

;

Hoffmann, Thomas

;

Kubicek, Stefan

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de Marneffe, Jean-Francois

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;

Vrancken, Christa

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Biesemans, Serge

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;

Verheyden, Kurt

;

Vanormelingen, Koen

;

Granneman, Ernst

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1968 since deposited on 2021-10-16

Acq. date: 2025-12-09