Browsing by Author "Green, Martin L."
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Publication Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology
Publication The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation
Proceedings paper2004, Atomic Layer Deposition Conference, 16/08/2004