Browsing by Author "Guerrero, Douglas J."
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Publication Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 3, p.Art. 034602Publication Functional underlayers for dose reduction and collapse mitigation in EUV lithography: a factorial analysis
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 27500I