Browsing by Author "Gunay Demirkol, Anil"
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Publication Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control
Proceedings paper2016, Metrology, Inspection, and Process Control for Microlithography XXX, 21/02/2016, p.977807Publication Self-aligned-quadruple-patterning for N7/N5 silicon fins
Proceedings paper2016, SPIE Lithography Symposium Advanced Etch Technology for Nanopatterning V, 22/02/2016, p.DOI: 10.1117/2.1