Browsing by Author "Gutt, T."
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Publication Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies
Oral presentation1999, European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.Publication Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
Journal article2000, Microelectronic Engineering, (50) 1_4, p.103-116Publication In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer
Proceedings paper1998, Rapid Thermal and Integrated Processing VII, 13/04/1998, p.51-56Publication Measurements of trace gaseous ambient impurities on an atmospheric pressure rapid thermal processor
Journal article1999, J. Vacuum Science and Technology A, (17) 2, p.650-656