Browsing by Author "Hackbarth, T."
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Publication Comparison of sub-micron Si:SiGe heterojunction nFETs to Si nMOSFET in present-day technologies
Publication Strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures by Si+ ion implantation
; Oral presentation2004, 14th International Conference on Ion Beam Modification of Materials - IBMMPublication Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
Publication Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing