Browsing by Author "Hapli, John"
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Publication Double-patterning interactions with wafer processing, optical proximity correction, and physical design flows
Publication Interactions of double patterning technology with wafer processing, OPC and design flows
Publication Physical design and mask synthesis considerations for DPT
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Physical design and mask synthesis considerations for DPT
Proceedings paper2008, SEMATECH Litho Forum, 13/05/2008